Microelectronics: Plasma Dicer APX300

Plasma Dicer APX300 design engineers Panasonic
Plasma Dicer APX300 Panasonic

With over 25 years industry experience fabricating semiconductors, Panasonic is pleased to introduce our latest plasma dicing solution: APX300. This machine is ideal for thin, brittle, and ultra-small die packages.

Achieve ultra-narrow dicing streets at 20μm for thin wafers down to 50μm.

And unlike blade dicing, plasma dicing will not induce edge chipping or surface layer stress damage related to mechanical heat.

Features & Benefits

Capable of dicing very thin wafers without damage
Conventional wafer dicing systems using blade dicing technology are disadvantageous in that chipping, cracks or the like are generated when handling very thin wafers or wafers with a low mechanical strength, causing low yields. APX300, on the other hand, made it possible to dice silicon wafers without causing damage on them by employing plasma etching technology and using no conventional machining process. Plasma dicing is characterized in that no wafer is chipped, a reduced dicing width of approx. 1/3 of that with blade-dicing technology is achieved and a larger number of chips are produced depending on the size of chips. With plasma dicing technology, it is also possible to simultaneously divide a wafer along the dicing lines provided on the entire wafer surface, and therefore small sized chips can be obtained at high speed.

Usable for various types of supported wafers
APX300 can perform plasma dicing on wafers with protective tape for back grinding, wafers with a dicing frame, wafers with a glass supported substrate, etc.

Specifications

Model IDAPX300
Model No.NM-EFE3AA

Plasma Source

ICP plasma
Process Gas4 Lines (standard)
(Maximum 6 Lines : Chlorinated Gas, Fluoride Gas, Ar, O2, He, etc.)
Wafer size *1Ø 100 mm wafer with orientation flat (standard)
Dimensions (mm)W 1,350 x D 2,230 x H 2,000
(Does not include touch panels, operation section and signal tower)
Weight2,100 kg (differs depending on machine configuration)
Power Source *23-phase AC 200 / 208 / 220 / 230 / 240 ±10V, 50 / 60 Hz, 21.00kVA
Pneumatic Source0.5 MPa to 0.7 MPa, 250 L/min (A.N.R.)
N2 Source0.1 MPa to 0.2 MPa, 50 L/min (A.N.R.)
*1 : For other size wafers, please contact us
*2 : 2 line 3-phase power source, and this shows the total